P-Series & HRP Support

KLA-Tencor Profilometer Repair

Independent service for KLA-Tencor stylus profilers, heads, controllers, boards, and stage systems.

Supported P-series models

Direct Advanced Operations services KLA-Tencor P10, P11, P12, P14, P15, P16, P20 and P22 systems with handler. The technician also works on KLA-Tencor HRP instruments and P-series stylus sensors and micro heads.

We diagnose complete systems and repair components including system controllers, scanning boards, stage controller boards, system boards, CCD and video subsystems, and stylus sensor assemblies.

Repair, maintenance, and parts

We can evaluate startup and controller failures, scanning or stage behavior, head and sensor issues, imaging problems, and systems that need maintenance or adjustment. Rebuilt P-series stylus assemblies and other replacement components may also be available.

Legacy systems and on-site support

DAO works on older DOS-based control systems as well as Windows-based instruments. A technician can travel for on-site work, or a system can be evaluated for ship-in refurbishment. Support depends on the exact model and configuration.

How to get an evaluation

Send the exact model, current symptoms, error messages, and photos of the instrument or assembly. We will discuss the best service path.