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Spare Parts

Parts & Components

We sell spare parts and can provide on-site installation and service. Contact us for inquiries and ordering.

Tencor P-11 stylus head assembly
Stylus Head Assembly

Tencor P-11 Stylus Head Assembly

Replacement stylus head assembly for the KLA-Tencor P-11 series stylus profiler. Contact us for availability, pricing, and installation.

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More Parts

Looking for something specific?

We regularly source spare parts for the platforms we service — controllers, boards, stylus assemblies, and more. Reach out with your system model and we'll check availability.

Veeco Wyko Dektak Bruker KLA-Tencor P Series Quesant AFM Candela OSA HRP